| Item |
Specification |
| Product Name |
2" Standard Sapphire Wafer |
4" Standard Sapphire Wafer |
6" Standard Sapphire Wafer |
| Substrate Materials |
High Purity Al2O3
|
Per Customers' Request |
Surface Plane Orientataion
|
C-axis tilted toward M-axis 0.20 +/- 0.10 deg. |
| C-axis tilted toward A-axis 0.00 +/- 0.10 deg. |
| Primary Flat Orientation |
A-axis 0.00 +/- 0.20 deg. |
| Diameter |
50.8 +/- 0.1 mm |
100 +/- 0.1 mm |
| Thickness |
430 +/- 15 µm |
650 +/- 15 µm
|
| Flat Length |
16.0 +/- 1.0 mm |
30.0 +/- 1.0 mm |
| TTV |
< 10 µm |
< 20 µm
|
| Bow |
-10 ~ 0 µm |
-20 ~ 0 µm
|
| Warp |
< 15 µm |
< 30 µm
|
| Front-side Roughness (Ra) |
< 3 Å |
< 3 Å
|
| Back-side Roughness (Ra) |
1 +/- 0.2 µm |
1 +/- 0.2µm
|
| Wafer Edge |
T type |
|
Remarks:
Customised thickness and flat length are available upon customers' requirement.
|
